DONGGUAN LONROY EQUIPMENT CO LTD
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10L Square Chamber Vacuum Plasma Cleaning Machine Plasma Cleaner Lab Equipment
| Cavity material | Stainless steel surface treatment |
| Power supply | AC220V |
| Working current | 3 The whole machine working current is not more than 1.2A (excluding vacuum pump) RF power |
| RF frequency | 40KHZ (offset less than 0.2KHz) |
| Frequency offset | Less than 0.2KHz |
| Characteristic positive resistance | 50 ohms, automatic matching |
| Vacuum degree | 1pa-30Pa |
| Number of gas paths | Dual gas input |
| Gas flow rate | 10-160ml/min (adjustable) |
| Process control | PLC human-machine interface automatic and manual mode |
| Cleaning time | 1-99999 seconds adjustable |
| Power size | 10%-100% adjustable |
| Inner cavity size | 220 x260x200mm 10L |
| Outer dimensions | 650 x550x440mm |
| Vacuum pump | 2XZ-4 (pumping speed 4L/S) |
| Vacuum chamber temperature | Less than 30°C |
| Cooling method | Forced air cooling |